Method for manufacturing a semiconductor device utilizing self-a

Details Method for manufacturing a semiconductor device utilizing self-a Method for manufacturing a semiconductor device utilizing self-a

1986-02-25

1989-05-16

Saba, William G.

Fishing, trapping, and vermin destroying

148DIG19, 148DIG106, 148DIG141, 148DIG156, 156643, 156652, 156653, 156664, 357 15, 357 71, 437187, 437200, 437203, 437913, H01L 2128, H01L 21306

Patent

active

048309710

ABSTRACT:
A method for manufacturing a semiconductor device of the invention comprises the steps of

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Kircher et al., "Interconnection Method for Integrated Circuit" I.B.M. Tech. Discl. Bull., vol. 13, No. 2, Jul. 1970, p. 436.
I.B.M. Tech. Discl. Bull., vol. 21, No. 3, Aug. 1978, pp. 2150-2151.
Nikkei Electronics, Sep. 1, 1980, pp. 62-65.

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