Surface acoustic wave device and method of manufacturing the sam

Details Surface acoustic wave device and method of manufacturing the sam Surface acoustic wave device and method of manufacturing the sam

1997-09-02

2000-01-25

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310344, 310346, H01L 4108

Patent

active

060182113

ABSTRACT:
A surface acoustic wave device is manufactured by directly or indirectly bonding a lid to a substrate having a surface acoustic wave element to seal the element under the lid. The lid is made of at least one material selected from the group comprising lithium niobate, lithium tantalete, lithium borate, glass and quartz. The substrate is made of at least one material selected from the group comprising quartz, lithium niobate, lithium tantalete and lithium borate.

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