Electromagnetic support with position-independent characteristic

Details Electromagnetic support with position-independent characteristic Electromagnetic support with position-independent characteristic

1991-03-04

1993-07-13

Gaffin, Jeffrey A.

Electricity: electrical systems and devices

Control circuits for electromagnetic devices

Systems for magnetizing, demagnetizing, or controlling the...

310 905, 361146, 32420711, H02N 1500

Patent

active

052279480

ABSTRACT:
A device for positioning a body (5) by means of at least two electromagnets (13, 15). A position sensor (29) measures the size of an air gap (23) between one of the electromagnets (13, 15) and a guide beam (1). An output signal of the position sensor (29) is applied to an electronic control unit (35) which passes a control current through the electromagnets (13, 15) in dependence on a difference between the measured and a desired size of the air gap (23). An electronic multiplier (47, 59) is connected between the control unit (35) and each of the electromagnets (13, 15), multiplying a control signal from the control unit (35) by the output signal from the position sensor (29). In this way a force exerted by the electromagnets (13, 15) on the guide beam (1) depends exclusively on the value of the control signal and not on the size of the air gap (23), so that a position-independent control is obtained. Such an accurate position-independent control may be used in an optical lithographic device for the irradiation of semiconductor substrates. Alternatively, such an electromagnetic support with a position-independent control may be constructed so as to form a micromanipulator.

REFERENCES:
patent: 4737823 (1988-04-01), Bouwer et al.
patent: 4795927 (1989-01-01), Morii et al.
patent: 5013987 (1991-05-01), Wakui
patent: 5066879 (1991-11-01), Yamomura
patent: 5093754 (1992-03-01), Kawashima

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