Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1991-06-24
1993-07-13
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Step and repeat
G03B 2742
Patent
active
052278395
ABSTRACT:
A method and apparatus for printing arbitrarily large circuit patterns using small field optics. The use of small field imaging optics allows the use of high NA lens designs capable of printing smaller geometries than otherwise would be possible. The field size in a first axis is extended by scanning an object and image past the lens; the field size in a second axis is extended by stitching the scans together in an overlapped fashion. This overlapped printing technique averages many random and systematic errors and allows the placement of field adjacencies within die boundaries. The effective field size of such a system is limited only be reticle size and stage mechanics. The apparatus further includes error correction loops for enhancing stage synchronization accuracy and for reducing field adjacency errors.
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Etec Systems, Inc.
Wintercorn Richard A.
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