Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1992-01-30
1993-07-13
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
2504922, 250307, H01J 314
Patent
active
052276260
ABSTRACT:
A lithography apparatus is provided with an SXM base, which has a plurality of cantilevers movably supporting probes at their free ends, respectively. The SXM base is secured to a mirror base by a support arm via inchworm devices, such that it faces a silicon wafer placed on a wafer stage. The silicon wafer has an alignment pattern formed thereon, while the SXM base has a reference alignment pattern formed thereon which is similar to the alignment pattern. A voltage is applied to the probes at a predetermined point of time under the control of a controller while a gas containing a film-forming material is being supplied onto the wafer, whereby the film-forming material is adsorbed in a desired portion of the surface of the wafer.
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Nanotechnology 1 (1990), "The Scanning Tunneling Microscope As A Tool For Nanofabrication", pp. 67-80.
Kajimura Hiroshi
Okada Takao
Nelms David C.
Olympus Optical Co,. Ltd.
Shami K.
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