Silicon wafers containing conductive feedthroughs

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration

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Details

Other Related Categories

257698, 257700, 257739, 257773, 257714, 257621, H01L 2940

Type

Patent

Status

active

Patent number

055106552

Description

ABSTRACT:
Silicon wafers containing conductive feedthroughs of an hourglass shape located around their peripheries that can be incorporated into multichip modules that includes silicon wafer spacers having radial grooves for receiving cooling fluid.

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patent: 4695872 (1987-09-01), Chatterjee
patent: 4725562 (1988-02-01), El-Kareh et al.
patent: 4737470 (1988-04-01), Bean
patent: 4765864 (1988-08-01), Holland et al.
patent: 4849374 (1989-07-01), Chen et al.
patent: 4954458 (1990-09-01), Reid
patent: 5039628 (1991-08-01), Carey
Wu, "Wafer Structure Permitting Distribution from the Back Side of the Wafer", IBM Technical Disclosure, vol. 16, No. 9 Feb. 1974, pp. 2898-2899.

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