Method of planarizing trench structures

Details Method of planarizing trench structures Method of planarizing trench structures

1994-01-14

1995-10-10

Powell, William

Fishing, trapping, and vermin destroying

1566551, 1566621, 1566481, 437228, H01L 21306, B44C 122, B29C 3700

Patent

active

054567971

ABSTRACT:
A method of planarizing trench-like structures, particularly on semiconductor substrates, by filling in the trench-like structures. For this purpose, a pre-polymer is selectively filled into the trench-like structures, is hardened and is then expanded.

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patent: 5271801 (1993-12-01), Valette
Booth, Bruce L. Low Loss Channel Waveguides in Polymers, Journal of Lightwave Technology, vol. 7, No. 10, Oct. 1989, New York, US, pp. 1445-1453.

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