Process for producing a pressure transducer using silicon-on-ins

Details Process for producing a pressure transducer using silicon-on-ins Process for producing a pressure transducer using silicon-on-ins

1993-12-15

1996-04-23

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437228N, 437 26, 437901, 437927, 437921, 148DIG135, 148DIG159, H01L 21265, H01L 2174, H01L 21764

Patent

active

055102760

ABSTRACT:
A process for producing a pressure transducer or sensor using the silicon-on-insulator method is provided. The process includes the following steps: (a) producing a monocrystalline silicon film (44) on a silicon substrate (6) at least locally separated from the latter by an insulating layer (42), (b) producing an opening (24) in the silicon film down to the insulating layer, (c) partially eliminating the insulating layer via the opening in order to form the diaphragm in the silicon film, and (d) resealing the opening (26).

REFERENCES:
patent: 4262399 (1981-04-01), Cady
patent: 4665610 (1987-05-01), Barth
patent: 4838088 (1989-06-01), Murakami
patent: 4925805 (1990-05-01), van Ommen et al.
patent: 5095401 (1992-03-01), Zavracky et al.
patent: 5241864 (1993-09-01), Addie et al.
patent: 5258097 (1993-11-01), Mastrangelo
patent: 5321989 (1994-06-01), Zimmer et al.
patent: 5332469 (1994-07-01), Mastrangelo
patent: 5369544 (1994-11-01), Mastrangelo
J. Electrochem. Soc., vol. 137, Nov. 1990, "Anisotropic Etching of Crystalline Silicon . . .", Seidel et al pp. 3626-3632.
IEEE Transactions of Electron Devices, vol. 36, Apr. 1989, "Study of Electrochemical Etch--stop. . ." Kloeck et al.
Transducer's 87, Tokyo Jun. 1987, "Fine Grained Polysilicon & Its Application . . .", Guckel et al, pp. 227-282.
Transducers 1991, "Surface Micromachines Micro-Diaphragm Pressure Sensors", Jun., pp. 188-191.
Silicon Based Sensors -Digest of Technical Papers, 1986 Dec., "Micromachining of Silicon by Selective Adodisation".
Transducers' 91 Digest of Technical Papers, "Stability & Common Mode Sensitivity . . .", Holm et al, pp. 978-981.
Technical Digest MNE'90, Berlin, Nov. 1990, pp. 81-86, "Wafer Bonding and Its Application Silicon . . . ", Harendt et al.

Affiliated with

Also associated with

Rating

Process for producing a pressure transducer using silicon-on-ins does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Process for producing a pressure transducer using silicon-on-ins, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for producing a pressure transducer using silicon-on-ins will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2307986