System for fabricating thin-film electronic components

Details System for fabricating thin-film electronic components System for fabricating thin-film electronic components

1976-12-13

1978-06-27

Reynolds, Wm. Carter

Coating apparatus

Edible base or coating type

Tumbling particulate work

118 49, 118301, C23C 1308, B05B 1504

Patent

active

040968219

ABSTRACT:
A system is disclosed for fabricating thin-film electronic components upon a substrate. A unitary metal aperture mask is utilized which includes a plurality of linearly aligned aperture patterns formed in the unitary mask. The mask is coupled with a linear motion assembly, and an electro-optic sensor which reads position indicating alignment marks upon the mask to provide precise and accurate mask alignment during subsequent fabrication steps in the vacuum deposition process. This system avoids the use of individual deposition masks which must be successively aligned.

REFERENCES:
patent: 2614524 (1952-10-01), Haynes
patent: 3117025 (1964-01-01), Learn et al.
patent: 3205855 (1965-09-01), Ault
patent: 3230109 (1966-01-01), Domaleski
patent: 3636917 (1972-01-01), Baker
patent: 3669060 (1972-06-01), Page et al.
patent: 3747558 (1973-07-01), Harel
Krongelb, IBM Technical Disclosure Bulletin, vol. 14, No. 3, Aug. 1971, pp. 772, 773.

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