Photo-assisted annealing process for activation of acceptors in

Details Photo-assisted annealing process for activation of acceptors in Photo-assisted annealing process for activation of acceptors in

1996-02-20

1998-07-28

Nguyen, Tuan H.

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Compound semiconductor

438 45, 438510, 438518, 438522, H01L 2100

Patent

active

057862338

ABSTRACT:
Active acceptor concentrations of p-doped II-VI and III-V semiconductor compound layer provided by chemical vapor deposition are increased by photo-assisted annealing.

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Pearton et al. in "Electronics Letters, vol. 30(6),Mar. 1994", in Electrical passivationin hydrogen plasma exposed GaN, Mar. 1994.
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Applied Physics Letter, 65(5) 1994, pp. 593-594, by T. Tanka et al.

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