Surface acoustic wave device

Details Surface acoustic wave device Surface acoustic wave device

1990-04-12

1992-11-10

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310363, 310364, 310313B, 310313C, 310313D, H01L 4108

Patent

active

051626900

ABSTRACT:
Interdigital transducers (3, 4) and reflectors (5, 6) are formed on a piezoelectric substrate (2) by an aluminum film. The aluminum film is crystallographically oriented in a constant direction, whereby stressmigration of the aluminum film is suppressed.

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