Confocal scanning interference microscope using reference beam

Details Confocal scanning interference microscope using reference beam Confocal scanning interference microscope using reference beam

1991-10-18

1992-11-10

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356352, 359371, H01J 314

Patent

active

051626489

ABSTRACT:
A confocal scanning type of interference microscope comprises a sample supporting member on which a sample is supported, a light source which produces a light beam, and a light projecting optical system with which a small light spot of the light beam is formed on the sample. A light receiving optical system condenses the light beam radiated out of the sample and forms a point image, which is detected by a photodetector. Before the light beam impinges upon the sample, a beam splitting device splits it into a light beam, which is to be irradiated to the sample, and a reference light beam, which is not to be irradiated to the sample. A beam combining device combines the light beam radiated out of the sample and the reference light beam. A reference light beam optical system equivalent to the light projecting and receiving optical systems is located in the optical path of the reference light beam. An optical system supporting member supports the light projecting optical system, the light receiving optical system, and the reference light beam optical system. A scanning device moves the sample supporting member with respect to the optical system supporting member, whereby the sample is scanned two-dimensionally with the light spot.

REFERENCES:
patent: 4627730 (1986-12-01), Jungerman et al.
patent: 5048964 (1991-09-01), Tyrer et al.
patent: 5065008 (1991-11-01), Hakamata et al.
patent: 5081349 (1992-01-01), Iwasaki
patent: 5081350 (1992-01-01), Iwasaki et al.
patent: 5084612 (1992-01-01), Iwasaki et al.

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