Method and apparatus for on-line determination of the thickness

Details Method and apparatus for on-line determination of the thickness Method and apparatus for on-line determination of the thickness

1996-09-17

1998-03-24

Font, Frank G.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356 731, 356345, G01B 902

Patent

active

057318760

ABSTRACT:
An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes low coherence light source that generates a probe light signal. The film is positioned against a roller having a partially reflecting surface that is positioned at a fixed distance from the film. The probe light signal is applied to the film and is then reflected back through the film by the partially reflecting surface. The light leaving the film is collected to form the input to a receiver that determines the time delay between light reflected from the top and bottom surfaces of the film. The receiver output may also be used to determine the thickness of the various layers in a multi-layer film.

REFERENCES:
patent: 3982816 (1976-09-01), Watkins
patent: 5473432 (1995-12-01), Sorin

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