Dark field illumination apparatus for epi-illumination system

Details Dark field illumination apparatus for epi-illumination system Dark field illumination apparatus for epi-illumination system

1985-04-09

1986-12-02

Henry, Jon W.

350434, 350443, G02B 2110

Patent

active

046260790

ABSTRACT:
In dark field illumination apparatus for epi-illumination system, in order to attain the above and other objects, the present invention provides an annular light beam which is coaxial with the optical axis of the objective lens and is supplied along an optical path formed surrounding the objective lens. An annular condenser member is arranged near the object side end of the objective lens in such manner that the beam reaches the object surface while being concentrated in the direction toward the optical axis by the condenser member.

REFERENCES:
patent: 1943510 (1934-01-01), Bauersfeld et al.
patent: 2884992 (1958-07-01), Bernhardt
patent: 4186993 (1980-02-01), Shimizu et al.
patent: 4475796 (1984-10-01), Kimura

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