Method of making microscopic multiprobes

Details Method of making microscopic multiprobes Method of making microscopic multiprobes

1989-05-16

1992-03-10

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 90, 437186, 437195, 313309, H01L 2120

Patent

active

050949756

ABSTRACT:
A thin, electrically insulating film is formed on a crystalline substrate and a multiplicity of holes are densely formed in the film. Conductive crystals are epitaxially grown on the substrate exposed in the holes, thereby forming on said substrate densely populated probes having sharp apices.

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patent: 4513308 (1985-04-01), Greene et al.
patent: 4698316 (1987-10-01), Corboy
patent: 4721885 (1988-01-01), Brodie
C. A. Spindt et al., "Physical Properties of Thin-Film Field Emission Cathodes with Molybdenum Cones", J. of Applied Physics, vol. 47, No. 12, Dec. 76, pp. 5248-5263.
J. B. Warren, "Control of Silicon Field Emitter Shape with Isotropically Etched Oxide Masks", Inst. Phys. Conf. Ser. No. 99, Section 2, Bath, 1989, pp. 37-40.

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