Method of manufacturing electroluminescent compound semiconducto

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357 16, 357 61, H01L 3300

Patent

active

042164842

ABSTRACT:
A method of manufacturing an electroluminescent compound semiconductor wafer having epitaxial film layers each composed of a semiconductor containing components belonging to III and V groups of the periodic table one of which layers has the mixed crystal ratio of the components being constant comprises the step of at least reducing the supply of at least one of the III and V components at least once during the formation of the one layer.

REFERENCES:
patent: 3963538 (1976-06-01), Broadie
patent: 3963539 (1976-06-01), Kemlage
patent: 4117504 (1978-09-01), Maslov

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