Patent
1978-05-08
1980-08-05
Edlow, Martin H.
357 16, 357 61, H01L 3300
Patent
active
042164842
ABSTRACT:
A method of manufacturing an electroluminescent compound semiconductor wafer having epitaxial film layers each composed of a semiconductor containing components belonging to III and V groups of the periodic table one of which layers has the mixed crystal ratio of the components being constant comprises the step of at least reducing the supply of at least one of the III and V components at least once during the formation of the one layer.
REFERENCES:
patent: 3963538 (1976-06-01), Broadie
patent: 3963539 (1976-06-01), Kemlage
patent: 4117504 (1978-09-01), Maslov
Fujita Hisanori
Hasegawa Shinichi
Edlow Martin H.
Mitsubishi Monsanto Chemical Company
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