Equipment performance apparatus and method

Details Equipment performance apparatus and method Equipment performance apparatus and method

1994-11-15

1996-06-18

Ramirez, Ellis B.

Boots, shoes, and leggings

H01L 2166

Patent

active

055285104

ABSTRACT:
A process control system and method is described that yields improvement in product throughput through the use of tuned model process control using product and machine parametric data, process control via real time critical equipment transient monitoring, process windowing of critical equipment of equipment transients and machine/product parametric data correlation. A machine monitoring technique is described which allows precise machine utilization tracking independent of the physical machine process recipe set by the user. With the system, an objective analysis and comparison of machine utilization indices of like equipment in different factories which process different products with different machine recipes is possible.

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