Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Patent
1978-12-22
1980-08-05
Budd, Mark O.
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
333152, 310338, 73754, H01L 4110
Patent
active
042164010
ABSTRACT:
An improved SAW pressure sensor structure includes a dual substrate sensor having a SAW substrate with a SAW delay line disposed in an active signal region on a first one of two parallel major surfaces thereof, and having a centrally apertured base substrate of the same material bonded at a mating surface thereof to the second one of the SAW substrate major surfaces with a glass seal, the dual substrates being bonded in crystallographic orientation, the central aperture having segmented portions to provide a major diameter opening at the mating surface coextensive with the active signal region to form a diaphragm and having a minor diameter opening at a second surface of the base substrate at a value less than one half that of the major diameter, the base substrate further including an O-ring groove adapted to receive one end of a cylindrical metal sleeve in a vacuum sealing relationship, the metal sleeve having a diameter equal to one half that of the aperture major diameter, the sleeve being bonded at another end to an orifice formed in one wall of a vacuum sealing enclosure adapted to receive the SAW sensor to provide a fluid conduit for external pressure signals between the orifice and the diaphragm formed in the SAW sensor.
REFERENCES:
patent: 3739315 (1973-06-01), Kurtz et al.
patent: 3753196 (1973-08-01), Kurtz et al.
patent: 3764950 (1973-10-01), Wallia
patent: 3878477 (1975-04-01), Dias et al.
patent: 3978731 (1976-09-01), Reeder et al.
Budd Mark O.
Chiantera Dominic J.
United Technologies Corporation
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