Compliant wafer prober docking adapter

Details Compliant wafer prober docking adapter Compliant wafer prober docking adapter

1997-02-04

1999-07-13

Ballato, Jose

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324765, G01R 3102

Patent

active

059231807

ABSTRACT:
A compliant wafer prober docking adapter provide compliant docking capability which permits a test head to be floated (to come down) to the top portion of the compliant adapter. The compliant adapter includes a compliant spring mechanism in the form of coiled springs which support a portion of the weight of the test head and wherein the upper portion of the adapter automatically aligns itself with the test head. This desirable aspect allows for all of the connectors to be seated properly, such that the locking of a cam locking mechanism provides a compliant and secure mating between the two surfaces. Also, a test head can be easily moved from one wafer prober to another, because the alignment of the adapter to the wafer is not being disturbed. Hence, the head can be moved between stations very quickly without having to go through another long and complex re-alignment process

REFERENCES:
patent: 4893074 (1990-01-01), Holt
patent: 5068601 (1991-11-01), Pamenter
patent: 5550466 (1996-08-01), Botka
patent: 5552701 (1996-09-01), Botka et al.
patent: 5606262 (1997-02-01), Montalbano
patent: 5663653 (1997-09-01), Schwindt
patent: 5677636 (1997-10-01), Slocum
patent: 5828225 (1998-10-01), Obikane

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