Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1998-05-15
1999-07-13
Chaudhuri, Olik
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257537, 257538, 438382, H01L 2900
Patent
active
059230789
ABSTRACT:
A method of forming a resistor from semiconductive material includes, a) providing a substrate; b) providing a layer of semiconductive material over the substrate; c) providing a pair of openings into the semiconductive material layer; d) plugging the pair of openings with an electrically conductive material to define a pair of electrically conductive pillars within the semiconductive material, the pair of pillars having semiconductive material extending therebetween to provide a resistor construction; and e) providing a conductive node to each of the electrically conductive pillars. An integrated circuit incorporating a resistor construction includes, i) a layer of semiconductive material; ii) a pair of electrically conductive pillars provided within the semiconductive material layer, the pair of pillars being separated from one another and thereby having a mass of the semiconductive material extending therebetween; and iii) an electrically conductive node in electrical connection with each of the respective conductive pillars. Alternately, a resistor is provided within a semiconductive substrate using different concentration diffusion regions.
REFERENCES:
patent: 3729662 (1973-04-01), Langdon
patent: 4292728 (1981-10-01), Endo
patent: 4497106 (1985-02-01), Momma
patent: 4898837 (1990-02-01), Takeda
patent: 4912053 (1990-03-01), Schrantz
patent: 5037766 (1991-08-01), Wang
patent: 5059549 (1991-10-01), Furuhata
patent: 5120572 (1992-06-01), Kumar
patent: 5168076 (1992-12-01), Godinho
patent: 5210438 (1993-05-01), Nakamura
patent: 5235312 (1993-08-01), Sandhu et al.
patent: 5244835 (1993-09-01), Hachiya
patent: 5364817 (1994-11-01), Lur et al.
patent: 5424239 (1995-06-01), Sweeney
patent: 5485138 (1996-01-01), Morris
Wolf, Stanley Ph.D., "Appendix A--IC Resistor Fabrication", Silicon Processing For The VLSI ERA vol. 2 Process Integration, Lattice Press, 1990, pp. 731-736.
Ahmad Aftab
Fazan Pierre C.
Juengling Werner
Lowrey Tyler
Pan Pai-Hung
Chaudhuri Olik
Micro)n Technology, Inc.
Wille Douglas A.
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