Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
Patent
1996-11-19
1999-07-13
Ford, John M.
Etching a substrate: processes
Forming or treating electrical conductor article
Forming or treating of groove or through hole
428901, 430316, 1566331, 1566511, 1566541, G02B 612, C23F 118, B44E 122, H01L 21306
Patent
active
059222166
ABSTRACT:
A method for manufacturing branching-off or intersecting channel-shaped waveguides on or in a substrate, which substrate encloses a light-guiding layer, and on which substrate there is applied an auxiliary-mask layer having a thickness t, the method comprising steps of:
Groen Fokke Hendrik
Pedersen J.o slashed.rgen Werngreen
Van Der Tol Johannes Jacobus Gerardus Maria
Ford John M.
Koninklijke PTT Nederland N.V.
Michaelson Peter L.
Pokotylo John C.
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