Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1987-01-30

1988-10-25

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 30, 355 53, G03B 2774, G03B 2780, G03B 2752

Patent

active

047807474

ABSTRACT:
A projection exposure apparatus includes illuminating means for applying energy rays to a mask having a predetermined pattern formed thereon, a projection optical system for forming the image of the pattern in a predetermined projected state on a responsive substrate, adjusting means for correcting the fluctuation of the projected state of the image caused by the passage of the energy rays, exposure control means for controlling the energy rays so that the pojected image of the pattern by the projection optical system is transferred onto the responsive substrate under a predetermined exposure condition, means for making information regarding the reflectivity of the responsive substrate, and main control means for controlling the adjusting means on the basis of the predetermined exposure condition of the exposure control means and the information regarding the reflectivity.

REFERENCES:
patent: 4498742 (1985-06-01), Uehara
patent: 4506977 (1985-03-01), Sato et al.
patent: 4512657 (1985-04-01), Sakato
patent: 4668077 (1987-05-01), Tanaka
patent: 4687322 (1987-08-01), Tanimoto et al.
patent: 4699505 (1987-10-01), Komoriya et al.
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4712910 (1987-12-01), Sakato
patent: 4737823 (1988-04-01), Bouwer et al.
patent: 4739373 (1988-04-01), Nishi et al.

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