Wafer boat for a vertical furnace

Details Wafer boat for a vertical furnace Wafer boat for a vertical furnace

1997-02-21

1999-07-13

Jeffery, John A.

Heating

Accessory means for holding, shielding or supporting work...

Support structure for heat treating ceramics

432253, F27D 500

Patent

active

059217731

ABSTRACT:
An improved wafer boat for a vertical furnace has inner upper and lower corners formed as sloped surfaces, and has outer upper and lower corners formed as sloped surfaces. This prevents the formation and collection of particles off of the wafer boat that can generate a protrusion on the wafer boat. By preventing the formation of a protrusion, this improved wafer boat prevents damage to the wafers processed in the wafer boat and improves the reliability of semiconductor devices formed from those wafers. Also, holes are provided for locking pins on both the upper and lower plates of the wafer boat. This means that the wafer boat can be loaded into the furnace in both a rightside-up and upside-down orientation, thus increasing the lifespan of the boat and reducing boat maintenance costs.

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