Surface defect inspection apparatus with microscope

Details Surface defect inspection apparatus with microscope Surface defect inspection apparatus with microscope

1989-07-28

1990-06-19

Groody, James J.

Facsimile and static presentation processing

Facsimile

Specific signal processing circuitry

369 58, H04N 718

Patent

active

049358111

ABSTRACT:
The apparatus inspects defects on tracks of an object to be inspected such as an optical disc or stamper. The apparatus has a defect detector, a controller for controlling the movement of the object, and a microscope for observing the tracks of the object. Position information on defects is obtained by the detector and, according to this position information, the object is moved so that the defects can be in the visual field of the microscope.

REFERENCES:
patent: 4395122 (1983-07-01), Southgate et al.
patent: 4477890 (1984-10-01), Mooney et al.
patent: 4812923 (1989-03-01), Fountain et al.
"The Point of Optical Disc Process Technology", K. K. Japanese Industrial Technology Center; 3-85; pp. 75 & 76.

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