Boots – shoes – and leggings
Patent
1996-04-11
1997-09-30
Trammell, James P.
Boots, shoes, and leggings
36446801, 36455101, 324765, 355 53, 355 55, 3561412, 3561521, 356400, 414247, 414935, 414936, 414937, 414940, 382141, 382144, 382145, G03B 2742, G01J 120
Patent
active
056732082
ABSTRACT:
A method and system for detecting focus spots. Data from a file created during stepper operation is extracted to get field coordinate position, leveling scheme, and tilt with respect to the x- and y-axes, and wafer height with respect to the focal plane for the multiple fields on the multiple wafers in a production batch. A delta value is calculated for the x- and y-axes tilt data which averages the tilt of each field with its surrounding fields. Delta values are placed in a 3-dimensional data structure linking neighboring fields and corresponding fields on subsequent wafers. Focus spots are detected by the repeated presence of data spikes over the sum of the arithmetic mean and some multiple of the standard deviation of the delta values.
REFERENCES:
patent: 4571685 (1986-02-01), Kamoshida
patent: 4780617 (1988-10-01), Umatate et al.
patent: 4818169 (1989-04-01), Schram
patent: 4908772 (1990-03-01), Chi
patent: 4982227 (1991-01-01), Suzuki
patent: 5070488 (1991-12-01), Fukushima et al.
patent: 5291239 (1994-03-01), Jackson
patent: 5361122 (1994-11-01), Kataoka et al.
patent: 5365051 (1994-11-01), Suzuki et al.
patent: 5422724 (1995-06-01), Kinney et al.
patent: 5483056 (1996-01-01), Imai
King Gregory
McMahon Michael
Meier Daniel
Dam Tuan Q.
Micro)n Technology, Inc.
Trammell James P.
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