Systems and methods for controlling semiconductor processing too

Details Systems and methods for controlling semiconductor processing too Systems and methods for controlling semiconductor processing too

1998-08-19

2000-10-10

Walberg, Teresa

Electric heating

Heating devices

With power supply and voltage or current regulation or...

219505, 374183, 374184, 374185, H05B 102

Patent

active

06130414&

ABSTRACT:
Systems and methods for controlling the temperature or other characteristic of semiconductor processing tools by measuring current flow to the tool is provided. In one embodiment, a current sensor is provided for measuring current flow to the heat source and generating an electrical signal proportional to the current flow. The current sensor includes a noise filter for reducing noise in the electrical signal induced by stray emf signals present around the processing tool. A controller, responsive to the electrical signal generated by the current sensor, is provided for controlling the processing tool. In this manner, the controller can, for example, allow for early detection of heat source failures or degradation. When such a condition is detected, the controller may, for instance, signal an audible or visual warning or shut down the processing tool.

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