Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1991-04-16
1992-03-31
Beck, Shrive
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 99, 4272481, 427259, 427261, 427282, 156612, B05D 306, B05D 512, C23C 1600
Patent
active
051006910
ABSTRACT:
A process for selective formation of a II-VI group compound film comprises applying a compound film forming treatment, in a gas phase including a starting material for supplying the group II atoms of periodic table and a starting material for supplying the group VI atoms of periodic table, on a substrate having a non-nucleation surface (S.sub.NDS) with small nucleation density and a nucleation surface (S.sub.NDL) with larger nucleation density (ND.sub.L) than the nucleation density (ND.sub.S) of said non-nucleation surface (S.sub.NDS) and a large area sufficient for a number of nuclei to be formed and forming selectively a II-VI group compound film only on said nucleation surface (S.sub.NDL).
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patent: 3697342 (1972-10-01), Cuomo
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patent: 4216037 (1980-08-01), Katoda et al.
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patent: 4467521 (1984-08-01), Spooner et al.
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patent: 4615904 (1986-10-01), Ehrlich et al.
patent: 4637127 (1987-01-01), Kurogi et al.
Tokunaga Hiroyuki
Yonehara Takao
Beck Shrive
Canon Kabushiki Kaisha
Padgett Marianne L.
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