Vacuum pump systems

Details Vacuum pump systems Vacuum pump systems

1989-04-11

1990-06-19

Koczo, Michael

Rotary expansible chamber devices

Multistage

Interengaging rotary members

418 88, 418 95, F04C 2502

Patent

active

049349082

ABSTRACT:
A vacuum pump system comprising a first vacuum pump having at least one pumping chamber with port means for communication with an enclosure to be evacuated and having mechanical pumping means mounted on at least one shaft whose bearings and/or gears are contained in a housing and a second vacuum pump having a first pumping chamber with means for communication with the chamber of the first pump and at least one further pumping chamber wherein means are provided for communication between the housing of the first pump and a further pumping chamber of the second pump.

REFERENCES:
patent: 2492075 (1949-12-01), Van Atta
patent: 2721694 (1955-10-01), Van Atta
patent: 2938664 (1960-05-01), Noller
patent: 2940661 (1960-06-01), Lorenz
patent: 4504201 (1985-03-01), Wycliffe
patent: 4662826 (1987-05-01), Nitta et al.
patent: 4770609 (1988-09-01), Uchida et al.
patent: 4797068 (1989-01-01), Hayakawa et al.

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