Microminiature tapered all-metal structures

Details Microminiature tapered all-metal structures Microminiature tapered all-metal structures

1991-06-28

1992-03-31

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

156628, 156647, 156662, 445 50, 164 45, 164 46, 164131, H01J 102

Patent

active

051003554

ABSTRACT:
In a structure comprising an ultra-sharp silicon tip coated with a layer of material, the silicon is removed from the structure. The remaining material is utilized as a mold. Metal deposited in the mold replicates the original silicone tip. In this way, ultra-sharp all-metal tips suitable, for example, as field-emitter sources are provided.

REFERENCES:
patent: 2817002 (1957-12-01), Dyke et al.
patent: 3921022 (1975-11-01), Levine
patent: 3970887 (1976-07-01), Smith et al.
patent: 4141405 (1979-02-01), Spindt
patent: 4307507 (1981-12-01), Gray et al.
patent: 4685996 (1987-08-01), Busta et al.
patent: 4721885 (1988-01-01), Brodie
patent: 4916002 (1990-04-01), Carver
Sprindt et al., "Physical properties of thin-film emission cathodes with molybdenum cones", Journal of Applied Physics, vol. 47, No. 12, Dec. 1976, pp.5248-5263.

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