Optical method of detecting defect and apparatus used therein

Details Optical method of detecting defect and apparatus used therein Optical method of detecting defect and apparatus used therein

1997-05-20

1999-04-13

Rosenberger, Richard A.

Optics: measuring and testing

Inspection of flaws or impurities

3562391, G01N 2100

Patent

active

058943455

ABSTRACT:
An array light source 1 with semiconductor laser sources disposed one-dimensionally and a projective lens 2 are used to illuminate an inspected object so that light beams projected from the array light source form a dotted line on the object. A line sensor is used to receive through an objective lens 3 light emitted from an imaging area 11 away from an illuminated area 12. An image signal, fed to an image processing unit 8 through a pre-processing unit 7 producing an image from signals from the line sensor 4 and a stage 5 is processed, while the stage 5 bearing the object 6 is being gradually moved, to inspect the object 6 for crack defects 9 and 10 by detecting an optically nonhomogeneous portion of the object. The method allows a crack defect of an object, such as a ceramic substrate or a sintered metal product, to be detected fast with high accuracy.

REFERENCES:
patent: 4555179 (1985-11-01), Langerhole et al.
patent: 5137355 (1992-08-01), Barbour et al.
patent: 5293538 (1994-03-01), Iwata et al.
patent: 5699153 (1997-12-01), Takamoto et al.

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