Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-05-12
1998-03-03
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Step and repeat
G03B 2742
Patent
active
057241210
ABSTRACT:
A deformable substrate chuck includes a deformable mounting plate supported by a plurality of individually controllable variable-length actuators. Each actuator is controllable to vary the height of the portion of the deformable mounting plate which it supports. A chamber within the mounting plate accessible through a vacuum port can be evacuated to hold a substrate such as a semiconductor wafer or a flat panel display to a porous top surface of the mounting plate. An optical sensing system senses the shape of the substrate and generates control signals used to control the lengths of the variable-length actuators to control the shape of the substrate.
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Burgess John R.
McKinley William G.
Piwczyk Bernhard P.
Braun Fred L.
Denson-Low W. K.
Hughes Danbury Optical Systems, Inc.
Schubert W. C.
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