Electric heating – Metal heating – Cutting or disintegrating
Patent
1993-02-03
1995-03-28
Evans, Geoffrey S.
Electric heating
Metal heating
Cutting or disintegrating
156644, 156657, 430 5, B23H 100, B23H 914, G03F 116
Patent
active
054019320
ABSTRACT:
The reverse side of a substrate made of stainless steel is subjected to electro-discharge machining using a thick electrode having a diameter of about 10 .mu.m, thus selectively etching other part than the edge of the reverse side of the substrate. This electro-discharge machining causes the other part than the edge of the substrate to be thinned to a thickness of about 10 .mu.m. The surface of the substrate thus thinned is subjected to electro-discharge machining using a slender electrode having a diameter of about 3 .mu.m, thus forming a pattern having a predetermined configuration in the surface of the substrate. Further, the surface of the substrate is etched with the use of the slender electrode, so that the pattern of the silicon substrate is pierced, thus forming a pattern having vertical through-holes. Thus, by using, as a mask material, a substrate solely made of stainless steel as it is, there can be produced a stencil mask which is excellent in mechanical strength and thermal stability and which is not thermally distorted.
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Endo Masayuki
Hashimoto Kazuhiko
Sasago Masaru
Evans Geoffrey S.
Matsushita Electric - Industrial Co., Ltd.
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