Semiconductor wafer cassette transportation apparatus and stocke

Details Semiconductor wafer cassette transportation apparatus and stocke Semiconductor wafer cassette transportation apparatus and stocke

1998-03-06

2000-10-10

Morse, Gregory A.

Material or article handling

Apparatus for charging a load holding or supporting element...

414940, 36447801, B65H 100

Patent

active

061294969

ABSTRACT:
A stocker used in a semiconductor wafer cassette transportation apparatus comprises a plurality of stockers for storing a plurality of semiconductor wafer cassettes. Each stocker comprises manual output and input ports for exit and entry of semiconductor wafer cassettes by an operator, in which each port has an ID card reader/writer arranged lower than the bottom surface of the cassette and facing a communication arrangement at the bottom surface of an ID card attached on the side surface of a cassette. An automatic carrier transports cassettes between stockers and a processing apparatus, and an inter-stocker transport device transports cassettes between stockers. The number of semiconductor wafer cassettes that can be mounted on the manual output port is determined according to the maximum number of semiconductor wafer cassettes requested to be loaded by the processing apparatus. An embodiment of the invention includes automatic carrier input and output ports. An outer shield door arrangement for various ports of the stocker prevents intrusion of foreign objects.

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