Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation
Patent
1997-08-15
1999-04-20
Evans, F. L.
Optics: measuring and testing
By dispersed light spectroscopy
With sample excitation
356314, 356316, 250288, G01J 3443, G01N 2162
Patent
active
058961968
ABSTRACT:
An instrument for analyzing a sample has an enclosure that forms a chamber containing an anode which divides the chamber into a discharge region and an analysis region. A gas inlet and outlet are provided to introduce and exhaust a rare gas into the discharge region. A cathode within the discharge region has a plurality of pins projecting in a geometric pattern toward the anode for exciting the gas and producing a plasma discharge between the cathode and the anode. Low energy electrons (e.g. <0.5 eV) pass into the analysis region through an aperture. The sample to be analyzed is placed into the analysis region and bombarded by the metastable rare gas atoms and the low energy electrons extracted into from the discharge region. A mass or optical spectrometer can be coupled to a port of the analysis region to analyze the resulting ions and light emission.
REFERENCES:
Sato et al., "Electron-temperature control by movable pins installed in a hollow cathode for discharge plasma", Appl. Phys. Lett. 62(6) pp. 567-569, (1993).
Iizuka et al., "Effect of electron temperature on negative hydrogen ion production in a low-pressure AR discharge plasma with methane", Appl.Phys.Lett. 62 p. 1619 (1993).
Iizuka et al., "Enhanced methyl-radical production in an Ar-CH4 pin hollow cathode discharge", Appl.Phys.Lett. 64 pp. 1786-1788 (1994).
Evans F. L.
Lockheed Martin Energy Research Corporation
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