Susceptor for rotary disc reactor

Details Susceptor for rotary disc reactor Susceptor for rotary disc reactor

1981-09-08

1983-05-31

Reynolds, B. A.

Electric heating

Metal heating

Of cylinders

219 1067, 219 1043, 219 1079, 118725, 118730, 427 451, H05B 610, C23C 1304

Patent

active

043862551

ABSTRACT:
A susceptor for use in a rotary disc reactor comprises a disc having a plurality of radial slots formed adjacent the periphery of the disc. The slots are circumferentially spaced from each other such that the oppositely-flowing heating currents in the sectors disposed between the slots are forced to be adjacent each other to cause a cancelling effect. A plurality of such discs may be supported in stack-like relationship by supporting posts having the ends thereof adapted to fit into the radial slots. Each disc also has radiation shielding means attached to and extending beyond the periphery thereof. The radiation shielding means is made of a material different from the susceptor material of the disc.

REFERENCES:
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patent: 1981632 (1934-11-01), Northrup
patent: 3070683 (1962-12-01), Moro-Lin et al.
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patent: 4082865 (1978-04-01), Ban et al.
patent: 4109128 (1978-08-01), Kohl
patent: 4113547 (1978-09-01), Katz et al.
Method of Achieving Elevated Substrate Temp. During Vacuum Deposition, Horstmann et al., IBM Technical Disclosure Bulletin, vol. 15, No. 2, p. 448, Jul. 1972.

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