Sealable, transportable container adapted for horizontal loading

Details Sealable, transportable container adapted for horizontal loading Sealable, transportable container adapted for horizontal loading

1995-08-23

1999-04-20

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414940, 206711, B65G 4907

Patent

active

058951911

ABSTRACT:
A transportable container for storing and carrying articles such as semiconductor wafers or flat panel display substrates which is adapted for horizontal loading and unloading. The container includes a box and a box door. The box door can be sealably attached to the box to isolate the interior of the box from ambient atmospheric conditions. The container is adapted to mate with a port of a canopy which encloses a semiconductor processing apparatus.

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Modular Isolation Capsule Is Here, Product Brochure.

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