Chemistry of inorganic compounds – Silicon or compound thereof – Binary compound
Patent
1991-11-08
1993-08-17
Breneman, R. Bruce
Chemistry of inorganic compounds
Silicon or compound thereof
Binary compound
501 97, C01B 21068
Patent
active
052366847
ABSTRACT:
To prepare spherical amorphous silicon nitride (Si.sub.3 N.sub.4), a silicon halide and ammonia are reacted in the vapor phase in the absence of water or water vapor in a vertically arranged reaction container, a silicon halide/ammonia reaction product being formed. In this reaction, a silicon halide/inert gas mixture is passed into the lower part of the reaction container and ammonia is passed into its upper part, the ratio of SiHal.sub.4 :NH.sub.3 being 1:(5.8 to 6.6). By establishing a stationary state, the reaction takes place only in the central part of the reaction container. After the silicon halide/ammonia reaction product has been removed from the reaction container, it is heated to temperatures of 950.degree. to 1150.degree. C. in an atmosphere containing ammonia.
REFERENCES:
patent: 3959446 (1976-05-01), Mazdiyasni et al.
patent: 4122155 (1978-10-01), Prochazka et al.
patent: 4416863 (1983-11-01), Sato et al.
patent: 4891339 (1990-01-01), Calcote et al.
patent: 4929432 (1990-05-01), Shen
Patent Abstracts of Japan, vol. 13, No. 315 [3663], 1989.
Patent Abstracts of Japan, vol. 14, No. 382 [4325], 1990.
Breneman R. Bruce
Hoechst Aktiengesellschaft
LandOfFree
Process for the preparation of spherical amorphous silicon nitri does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Process for the preparation of spherical amorphous silicon nitri, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Process for the preparation of spherical amorphous silicon nitri will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2242310