Metal working – Electric condenser making
Patent
1992-10-30
1995-03-28
Echols, P. W.
Metal working
Electric condenser making
296211, 228121, 73718, 338 2, 338 5, 427240, H01G 700, G01L 122, G01L 912, B05D 312
Patent
active
054004896
ABSTRACT:
To avoid any deterioration of the surface properties of objects of ceramic, glass, or a single-crystal insulating material which are subjected to a vacuum temperature process, a thin layer of a spin-on glass solution with a silicon-dioxide equivalent of not more than 10% is applied to the objects by spinning or spraying prior to the vacuum temperature process. This is particularly important to avoid the strong moisture dependence of capacitive or resistive pressure sensors having a substrate and a diaphragm to be joined together, forming a chamber sealed at least at the edge. The diaphragm is covered with a layer of silicon carbide, niobium, or tantalum serving as one capacitor electrode, or the surface portion of the diaphragm which will lie within the chamber is coated with at least one strain gage; the portion of the substrate surface which will lie within the chamber is coated with at least one additional capacitor electrode or, in the case of the resistive pressure sensor, not coated therewith; over the entire surface portion of the substrate and diaphragm thus coated, a thin layer of the spin-on glass solution is applied and dried; contact is made to the capacitor electrodes or strain gages through the substrate and/or diaphragm, and substrate and diaphragm are brazed together by a ring-shaped part of active brazing material, which also serves as a spacer, or by a sufficient amount of active brazing paste.
REFERENCES:
patent: 2329632 (1943-09-01), Marsden, Jr.
patent: 3811918 (1974-05-01), Levene
patent: 4511877 (1985-04-01), Nishikawa et al.
patent: 4630491 (1986-12-01), Kitagawa et al.
patent: 4841272 (1989-06-01), Yamagishi et al.
patent: 5001595 (1991-03-01), Dittrich et al.
patent: 5050034 (1991-09-01), Hegner et al.
S. K. Gupta, "Spin-on Glass for Dielectric Planarization", Microelectronic Manufacturing and Testing, vol. 12, No. 5, Apr. 1989, pp. 1 and 10-12.
Drewes Ulfert
Hegner Frank
LandOfFree
Method of stabilizing the surface properties of objects to be th does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of stabilizing the surface properties of objects to be th, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of stabilizing the surface properties of objects to be th will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2241915