Scanning near field optical microscope

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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250306, H01J 314

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active

058941223

ABSTRACT:
A high resolution observation apparatus capable of resolving details smaller than the wavelength of a laser beam used for detection includes a probe for scattering evanescent light projected from a sample in response to the incident laser light. The scattered evanescent light is detected by a photodetector located proximate the probe tip. During measurements, the position of the probe is controlled in the Z axis by a fine movement mechanism while being scanned in the XY plane to conduct measurements. The distance between the probe and the sample is maintained constant by use of a Z-axis servo circuit responsive to an output signal of the photodetector for producing a control signal to control the fine movement mechanism to maintain the detected evanescent light constant. A three-dimensional display of an output of the servo circuit is provided.

REFERENCES:
patent: 4947034 (1990-08-01), Wickramasinghe et al.
patent: 5294790 (1994-03-01), Ohta et al.
patent: 5304795 (1994-04-01), Fujihira et al.
Optical Society of America, Optics Letters, vol. 19, No. 3, Feb. 1, 1994, Yasushi Inouye et al., "Near-field Scanning Optical Microscope with a Metallic Probe Tip".

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