Modular IBAD apparatus for continuous coating

Details Modular IBAD apparatus for continuous coating Modular IBAD apparatus for continuous coating

1992-02-06

1993-08-17

Weisstuch, Aaron

Coating apparatus

Gas or vapor deposition

Multizone chamber

118718, 20429825, C23C 1654

Patent

active

052365093

ABSTRACT:
A modular ion beam assisted continuous coating apparatus and method for a wide range of materials and the products so made are disclosed. The materials include metals, such as all kinds of steels and the like in sheet, wire, tubing and rod forms, and plastics, such as all kinds of polymers again in sheet, wire, tubing and rod forms. The coatings on the materials are intended to improve their wear, corrosion and/or oxidation resistance as well as to enhance their aesthetic appearance. The coatings essentially include metals such as aluminum, chromium, cadmium, tin, zinc, iron, platinum, nickel, silver, gold, etc., and ceramics such as ZrO.sub.2, SiO.sub.2, Y.sub.2 O.sub.3, TiN and Si.sub.3 N.sub.4. The modular continuous coating apparatus essentially is divided into four stages a vacuum entry stage, a material pre-cleaning stage, an ion beam assisted coating stage, and a vacuum exit stage. Each stage and all operative components thereof are modular in design, such that any one stage or component can be removed and modified or repaired without the need of arresting the operation of the continuous coating apparatus.

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