Substrate transport drive system

Details Substrate transport drive system Substrate transport drive system

1997-06-12

1999-04-20

Herrman, Allan D.

Machine element or mechanism

Control lever and linkage systems

Multiple controlling elements for single controlled element

74 8915, 310114, 901 16, 901 23, B25J 1100, B25J 1800, F16H 2520

Patent

active

058947604

ABSTRACT:
A substrate transport having a housing, a drive assembly connected to the housing, and a moveable arm assembly operably connected to the drive assembly. The drive assembly has a frame stationarily connected to the housing forming a cage with an open side. The drive assembly has a rotational drive and a vertical drive. The rotational drive is movably mounted to the frame inside the cage by a carriage. The vertical drive is mounted to the bottom of the frame and is attached to the rotational drive to move the rotational drive up and down on the frame. The rotational drive has two mirror image drive units.

REFERENCES:
patent: 4645409 (1987-02-01), Gorman
patent: 4715921 (1987-12-01), Maher et al.
patent: 4787813 (1988-11-01), Stevens et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5506460 (1996-04-01), Steinhart et al.

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