Plasma stripper with multiple contact point cathode

Details Plasma stripper with multiple contact point cathode Plasma stripper with multiple contact point cathode

1987-01-12

1988-04-05

Paschall, M. H.

Electric heating

Metal heating

By arc

219121PD, 219121PR, 156646, 156345, B23K 900

Patent

active

047360879

ABSTRACT:
An improved plasma stripping apparatus with external electrodes is provided wherein the cathode has multiple small area contact points adjacent and in close proximity to or uniformly touching the reactor chamber to cause areas of high r.f. field densities that enhance the gas breakdown in the plasma to obtain high rate film removal.

REFERENCES:
patent: 4342901 (1982-08-01), Zajac
patent: 4431898 (1984-02-01), Reinberg et al.
patent: 4550239 (1985-10-01), Uehara et al.
patent: 4550242 (1985-10-01), Uehara et al.
patent: 4572759 (1986-02-01), Benzing
patent: 4585920 (1986-04-01), Hoog et al.
patent: 4657616 (1987-04-01), Benzing et al.

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