Piezoelectric composite thin film resonator

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

310328, 310331, 310346, H01L 4108

Patent

active

044568509

ABSTRACT:
A piezoelectric composite thin-film resonator has good temperature stability and resonance response, in a fundamental thickness-extensional vibration mode. Spurious vibrations caused by even-number order harmonic overtones are suppressed. The resonator has a thin film of SiO.sub.2 or other materials having a resonant frequency temperature coefficient which is opposite to that of the piezoelectric material. The SiO.sub.2 layer is inserted between two thin films of ZnO, CdS, AlN, or other piezoelectric materials. This sandwiched structure is positioned between a pair of electrode films and is supported by an insulative or a semiconductive film which is in turn fixed to a substrate. The thicknesses of the thin films have values such that an overall temperature coefficient of the resonant frequency may be at or near substantially zero. In order to better remove the even-number order harmonics, it is preferable to cover the upper electrode film with a thin film of semiconductor or insulator material.

REFERENCES:
patent: 2202391 (1940-05-01), Mason
patent: 3401275 (1968-09-01), Curran et al.
patent: 3437849 (1969-04-01), Treatch et al.
patent: 3486046 (1969-12-01), Zalar
patent: 3505572 (1970-04-01), Yamashita et al.
Acoustic Bulkwave Composite Resonators, by Lakin and Wang, Applied Physics Letters, vol. 38, No. 3, Feb. 1981, pp. 125-127.
Electronics Letters, Jul. 9, 1981, vol. 17, No. 14, ZnO/SiO.sub.2 -Diaphragm Composite Resonator on a Silicon Wafter, pp. 507-509.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Piezoelectric composite thin film resonator does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Piezoelectric composite thin film resonator, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Piezoelectric composite thin film resonator will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2234137

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.