Photo-detecting semiconductor device with passivation suppressin

Details Photo-detecting semiconductor device with passivation suppressin Photo-detecting semiconductor device with passivation suppressin

1988-09-01

1992-06-02

Jackson, Jr., Jerome

357 32, 357 52, 357 54, H01L 2714, H01L 2934

Patent

active

051191563

ABSTRACT:
A photo-detecting element is covered with a passivation film having an uneven surface to avoid multi-reflection for the monochromatic incident light. The uneven film transmits the same intensity of incident light even if the mean thickness of uneven film is not constant over the entire surface of a semiconductor substrate.

REFERENCES:
patent: 4277793 (1981-07-01), Webb
patent: 4555622 (1985-11-01), Glass et al.
patent: 4665422 (1987-05-01), Hirao et al.

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