Removal of residual catalyst from a dielectric substrate

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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427 98, G03C 500

Patent

active

047358203

ABSTRACT:
Residual catalyst is removed from a dielectric substrate by exposing the substrate to a plasma formed from an inert gas.

REFERENCES:
patent: 4214966 (1980-07-01), Mahoney
patent: 4357369 (1982-11-01), Kilichowski et al.
patent: 4545851 (1985-10-01), Takada
patent: 4568562 (1986-02-01), Phillips
patent: 4585668 (1986-04-01), Asmussen et al.
patent: 4610910 (1986-09-01), Kawamoto et al.

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