Coarse viewing system for an annular field projection system

Details Coarse viewing system for an annular field projection system Coarse viewing system for an annular field projection system

1974-09-26

1976-05-18

Bell, Jr., Houston S.

Optics: image projectors

Projected image combined with real object

353 99, 350 27, 350294, G03B 2128

Patent

active

039573648

ABSTRACT:
A viewing system for an annular projection system, particularly useful to provide a view of a semiconductor wafer on which an image of a integrated circuit mask pattern has been projected using an annular field projection system in which the field of view can be as large as the large dimension of that portion of the annular region subtended by the wafer thereby permitting ideal coarse alignment of the mask and wafer. The system further includes means to illuminate the mask and wafer separately and in different colors to thereby simplify the distinction of one from the other in the combined image thus facilitating the alignment task.

REFERENCES:
patent: 2482115 (1949-09-01), Laird
patent: 3598468 (1971-08-01), Perry
patent: 3667827 (1972-06-01), Lawrence
R-RCA Technical Notes, Antenna with Semi-Transparent Reflector, P. Foldes, RCA TN No: 539, 3/62.

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