Scanning type exposure apparatus, position control apparatus, an

Details Scanning type exposure apparatus, position control apparatus, an Scanning type exposure apparatus, position control apparatus, an

1999-07-13

2000-12-12

Adams, Russell

Photocopying

Projection printing and copying cameras

Step and repeat

355 72, 355 75, G03B 2742, G03B 2758, G03B 2762

Patent

active

06160612&

ABSTRACT:
A position control apparatus which controls a position of a stage. The apparatus includes an input device for inputting a reference locus for the stage, the reference locus including a group of scanning sections, each of which includes an acceleration section, a settling section associated with a provisional settling time, and a section for constant speed scanning, the stage settling to a constant speed in each settling section, a storage medium storing information regarding actual settling times, each of which corresponds to each scanning section, a correction device for correcting the reference locus on the basis of the information on the actual settling times, and a driving device for moving the stage in accordance with the reference locus corrected by the correction device.

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patent: 5822043 (1998-11-01), Ebinuma
patent: 5832620 (1998-11-01), Yamaguchi et al.

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