Measurement system using optical coherence shifting interferomet

Details Measurement system using optical coherence shifting interferomet Measurement system using optical coherence shifting interferomet

1992-08-31

1994-06-21

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356358, 356345, 25022727, G01B 902

Patent

active

053232291

ABSTRACT:
A coherence shifting interferometry system determines the thickness or refractive index of an optically transmissive medium. The system utilizes an optical energy source for generating a source beam. The source beam is divided into two beams by reflecting one portion of the beam off of a reflective surface, e.g., a front surface, of an optically transmissive test sample having the unknown thickness or refractive index. A second portion of the beam is transmitted through the sample and reflected off a refractive interface in the sample, e.g., a back surface. The two reflected beams are combined into a composite beam. The composite beam is then directed to a Mach-Zehnder type interferometer, where a portion of the combined beam traverses a fixed optical path length, and another portion traverses a variable optical path length. The variable optical path length is adjusted to realign portions of the two beams and cause interference, and the amount of adjustment provides a measure of the unknown thickness or refractive index.

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