Projection exposure apparatus

Details Projection exposure apparatus Projection exposure apparatus

1993-01-25

1994-06-21

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 43, 356401, 250236, G03B 2752

Patent

active

053232070

ABSTRACT:
A projection exposure apparatus includes a first stage for supporting a first object; a second stage for supporting a second object; a projection optical system for projecting an image of the first object onto the second object; an image pickup system having a predetermined image pickup surface and being arranged to illuminate a mark of the first object with a radiation beam such that, with a reflected beam from the first object resulting from the illumination, a first image of the mark of the first object is projected onto the image pickup surface and that, with a reflected beam from the second object resulting from the illumination and being directed to the image pickup surface through the first object, a second image of the mark of the first object is projected onto the image pickup surface; and a detecting device cooperable with the image pickup system, for detecting a deviation of the surface of the second object with respect to a plane on which the image of the first object is to be focused, on the basis of any positional deviation between the first and second images projected onto the image pickup surface.

REFERENCES:
patent: 3853398 (1974-12-01), Kano
patent: 4127777 (1978-11-01), Binder
patent: 4251129 (1981-02-01), Suzki et al.
patent: 4262208 (1981-04-01), Suzki et al.
patent: 4383757 (1983-05-01), Phillips
patent: 4395117 (1983-07-01), Suzuki
patent: 4406546 (1983-09-01), Suzuki
patent: 4540278 (1985-09-01), Phillips
patent: 4645924 (1987-02-01), Suzuki et al.
patent: 4650983 (1987-03-01), Suwa
patent: 4748333 (1988-05-01), Mizutani et al.

Affiliated with

Also associated with

Rating

Projection exposure apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2223949