Silicon germanium photodetector

Details Silicon germanium photodetector Silicon germanium photodetector

1985-11-18

1988-02-16

Edlow, Martin H.

357 13, 357 30, 357 16, H01L 2712

Patent

active

047258705

ABSTRACT:
A photodetector, comprising a Ge.sub.x Si.sub.1-x superlattice region between two silicon cladding layers in which the Ge.sub.x Si.sub.1-x layers absorb light, is described.

REFERENCES:
patent: 3626257 (1971-12-01), Esoki
patent: 4212019 (1980-07-01), Wataze
patent: 4616241 (1986-10-01), Biefeld
Capasso et al., International Electron Device Meeting Wash. D.C., (7-9 Dec. 1981), p. 284-IEDM 81.

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